JPH03128942U - - Google Patents
Info
- Publication number
- JPH03128942U JPH03128942U JP3734490U JP3734490U JPH03128942U JP H03128942 U JPH03128942 U JP H03128942U JP 3734490 U JP3734490 U JP 3734490U JP 3734490 U JP3734490 U JP 3734490U JP H03128942 U JPH03128942 U JP H03128942U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum tweezers
- connecting part
- joint
- wafer suction
- bent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3734490U JPH03128942U (en]) | 1990-04-09 | 1990-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3734490U JPH03128942U (en]) | 1990-04-09 | 1990-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03128942U true JPH03128942U (en]) | 1991-12-25 |
Family
ID=31544368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3734490U Pending JPH03128942U (en]) | 1990-04-09 | 1990-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03128942U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100308784B1 (ko) * | 1998-10-30 | 2001-12-17 | 곽정소 | 웨이퍼의 진공 흡착기 |
-
1990
- 1990-04-09 JP JP3734490U patent/JPH03128942U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100308784B1 (ko) * | 1998-10-30 | 2001-12-17 | 곽정소 | 웨이퍼의 진공 흡착기 |